| 1.Maximum temperature | 750ºC |
| 2.Temperature control accuracy | ±1ºC |
| 3.Furnace temperature uniformity |
Full load 15 points 400°C±8°C,
full load 15 points 600°C±5°C |
| 4.Ultimate vacuum | 6.7×10^4Pa |
| 5.Pressure rise rate | 0.4Pa/h |
| 6.Temperature control single zone | multi zone |
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